Micro valve and method for controlling transport of fluid by virtue of micro valve

The invention discloses a micro valve and a method for controlling the transport of a fluid by virtue of the micro valve. The micro valve comprises a piezoelectric substrate, wherein an interdigital transducer is arranged on the working surface of the piezoelectric substrate, and a first PDMS (polyd...

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Hauptverfasser: LIU WEIYUE, LI FENGZHI, WANG CHAOZE, ZHANG ANLIANG, CAO LEI
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Sprache:chi ; eng
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creator LIU WEIYUE
LI FENGZHI
WANG CHAOZE
ZHANG ANLIANG
CAO LEI
description The invention discloses a micro valve and a method for controlling the transport of a fluid by virtue of the micro valve. The micro valve comprises a piezoelectric substrate, wherein an interdigital transducer is arranged on the working surface of the piezoelectric substrate, and a first PDMS (polydimethylsiloxane) microgroove is formed in a sound transmission path of sound acoustic waves excited by the interdigital transducer; an opening in the top end of the first PDMS microgroove is covered by heat conduction sheet metal; a second PDMS microgroove is formed in the upper surface of the heat conduction sheet metal; a soft PDMS slice is connected to the opening in the top end of the second PDMS microgroove; a PDMS polymer is connected to the top end of the second PDMS microgroove; two micro-channels are soft-photoetched in the PDMS polymer; nicks communicated with the micro-channels are formed in positions, corresponding to the soft PDMS slices, at the bottom end of the PDMS polymer; the edges of the nicks ar
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subjects ACTUATING-FLOATS
BLASTING
COCKS
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
TAPS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
title Micro valve and method for controlling transport of fluid by virtue of micro valve
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