Micro valve and method for controlling transport of fluid by virtue of micro valve

The invention discloses a micro valve and a method for controlling the transport of a fluid by virtue of the micro valve. The micro valve comprises a piezoelectric substrate, wherein an interdigital transducer is arranged on the working surface of the piezoelectric substrate, and a first PDMS (polyd...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LIU WEIYUE, LI FENGZHI, WANG CHAOZE, ZHANG ANLIANG, CAO LEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	The invention discloses a micro valve and a method for controlling the transport of a fluid by virtue of the micro valve. The micro valve comprises a piezoelectric substrate, wherein an interdigital transducer is arranged on the working surface of the piezoelectric substrate, and a first PDMS (polydimethylsiloxane) microgroove is formed in a sound transmission path of sound acoustic waves excited by the interdigital transducer; an opening in the top end of the first PDMS microgroove is covered by heat conduction sheet metal; a second PDMS microgroove is formed in the upper surface of the heat conduction sheet metal; a soft PDMS slice is connected to the opening in the top end of the second PDMS microgroove; a PDMS polymer is connected to the top end of the second PDMS microgroove; two micro-channels are soft-photoetched in the PDMS polymer; nicks communicated with the micro-channels are formed in positions, corresponding to the soft PDMS slices, at the bottom end of the PDMS polymer; the edges of the nicks ar