Antireflective film for solar cell piece and manufacturing method thereof

The invention provides an antireflective film for a solar cell piece and a manufacturing method of the antireflective film. The antireflective film for the solar cell piece comprises a first silicon nitride layer covering the surface of the solar cell piece, a second silicon nitride layer covering the upper surface of the first silicon nitride layer and a third silicon nitride layer covering the upper surface of the second silicon nitride layer. By means of the antireflective film for the solar cell piece, the three layers of silicon nitride antireflective films are adopted, the good passivating effect can be achieved, the short-circuit current of the metallurgical polycrystalline silicon cell pieces can be improved, the reverse leakage current can be reduced, and photovoltaic conversion efficiency is improved. Meanwhile, according to the manufacturing method of the antireflective film, an intermittent deposition technology is adopted, that is, a certain dead time is added between depositions of the two layer