Method for producing electrically semi-conductive or conductive layers with improved conductivity

The invention relates to a method for producing electrically semi-conductive or conductive metal oxide layers with improved conductivity that are particularly suitable for the production of flexible thin-film transistors, to metal oxide layers produced therewith, and to the use thereof for producing...

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Bibliographische Detailangaben
Hauptverfasser: ISSANIN ALEXANDER, WALKER DANIEL, HAEMING MARC, BONRAD KLAUS, KIRSCH PEER, KLYSZCZ ANDREAS
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a method for producing electrically semi-conductive or conductive metal oxide layers with improved conductivity that are particularly suitable for the production of flexible thin-film transistors, to metal oxide layers produced therewith, and to the use thereof for producing electronic components.