Method for producing three-dimensional structures assembled with nanoparticles

The present invention relates to a method for producing three-dimensional structures assembled with nanoparticles using a pattern perforated mask. The present invention includes: (1) a step of forming an electric focusing lens by positioning a mask having a perforated pattern of predetermined width...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	CHOI MAN-SOO, CHOI HO-SEOP
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The present invention relates to a method for producing three-dimensional structures assembled with nanoparticles using a pattern perforated mask. The present invention includes: (1) a step of forming an electric focusing lens by positioning a mask having a perforated pattern of predetermined width (w) a predetermined distance (d) away from a substrate to be patterned in a grounded reactor, and applying a voltage thereto on the substrate; and (2) a step of introducing electrically charged nanoparticles and guiding electrically charged particles to the substrate through the pattern of the mask so that the electrically charged nanoparticles are focused on and attached to the substrate in a three-dimensional shape. According to the present invention, three-dimensional structures of various shapes can be produced with high precision and efficiency without generating a noise pattern.