Device for forming amorphous film and method for forming same

To provide: a large-sized formation device that is advantageous in forming a large-area amorphous film; and an amorphous film formation method performed by using said formation device. This amorphous film formation device sprays a flame including material particles toward a base material with a spra...

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Bibliographische Detailangaben
Hauptverfasser:	KURAHASHI RYUROU, TAKEHARA JUNJI, MATSUMOTO HIROSHI, FUKUTOME YOSHIHISA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide: a large-sized formation device that is advantageous in forming a large-area amorphous film; and an amorphous film formation method performed by using said formation device. This amorphous film formation device sprays a flame including material particles toward a base material with a spraying machine, fuses the material particles with the flame, and cools the material particles and the flame with a cooling gas from before the material particles and the flame reach the base material. Material particle spraying openings (11) and flame spraying openings (12) are provided continuously along a straight line in the front surface of the spraying machine such that the cross section of the flame including the material particles becomes long horizontally. Openings (13) from which an inert gas for regulating the flow of the flame and cooling same is sprayed are provided continuously along said straight line at positions on both sides of the material particle spraying openings (11) and the flame spraying openi