Method for fabricating an absorbing layer of a solar cell and a thermal treatment apparatus thereof

Method for fabricating an absorbing layer of a solar cell and a thermal treatment apparatus thereof

A method for fabricating an absorbing layer of a solar cell and a thermal treatment device (10 ' 50) thereof adapted for forming an absorbing layer on a substrate (20) are disclosed. The method the following steps. First, a solid-phase vapor source (120 ' 510) in a chamber (11 ' 551)...

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Bibliographische Detailangaben
Hauptverfasser: WU SHIH-HSIUNG, CHANG CHIA-WEN, WU TSUNG-SHIN, HSU HUNG-RU
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method for fabricating an absorbing layer of a solar cell and a thermal treatment device (10 ' 50) thereof adapted for forming an absorbing layer on a substrate (20) are disclosed. The method the following steps. First, a solid-phase vapor source (120 ' 510) in a chamber (11 ' 551) and an absorbing layer precursor (30) on a substrate (20) are maintained by a predetermined distance (D) (S103). The solid-phase vapor source (120 ' 510) contains tin. The absorbing layer precursor (30) contains copper, zinc, tin and sulfur. The temperature inside the chamber (11 ' 51) is raised to a forming temperature, so that the absorbing layer precursor (30) forms an absorbing layer on the substrate (20) (S104).