Heat treatment apparatus with levitation and transportation

Provided is a heat treatment apparatus with levitation and transportation for cooling heated substrates in a short time. Multiple levitation and transportation units are arranged in the heat treatment apparatus (1), and heat and transport the substrates while levitating the substrates at the same ti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DAISUKE OKUDA, YUYA MIYAJIMA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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