Heat treatment apparatus with levitation and transportation

Provided is a heat treatment apparatus with levitation and transportation for cooling heated substrates in a short time. Multiple levitation and transportation units are arranged in the heat treatment apparatus (1), and heat and transport the substrates while levitating the substrates at the same time through ultrasonic vibration sequentially. Each of the levitation and transportation units comprises a vibration plate part which levitates the substrates through the ultrasonic vibration; an ultrasonic generation part which applies the ultrasonic vibration to the vibration plate part; a transportation part which supports the end parts of the substrates and transports the substrates along the direction perpendicular to the levitating direction of the substrates. The heat treatment apparatus has a heating region (2) and a cooling region (3). In the heating region, the levitation and transportation units have heater parts for heating the vibration plate parts of the levitation and transportation units; and in the