Integrated circuit device and method of manufacturing same

The present invention discloses an integrated circuit device and a method for manufacturing the integrated circuit device. The disclosed method provides improved control over a surface proximity and tip depth of integrated circuit device. In an embodiment, the method achieves improved control by for...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OUYANG HUI, FAN WEIHAN, TSAI MING-HUAN, CHENG CHUN-FAI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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