Integrated manufacturing method of optical microspherical cavity made of wafer-level polymer

The invention relates to an integrated manufacturing method of an optical microspherical cavity made of a wafer-level polymer. By adoption of the manufacturing method, the problems that the process is tedious, the large-area ordered and controlled manufacture can not be achieved and the optical performance is not obvious in an existing process are overcome. The integrated manufacturing method comprises the following steps: manufacturing cylindrical bases on a round base piece; cleaning and drying the bases; spraying NOA73 optical cement on the cylindrical bases; exposing so as to obtain a cured NOA73 optical microspherical cavity; finally carrying out coupling on conical optical fibers and the microspherical cavity, and fixing the conical optical fibers on the cylindrical bases at the two sides by using AB adhesive so as to obtain an integrated structure of the optical microspherical cavity. The NOA73 optical microspherical cavity manufactured by adopting the integrated manufacturing method has the characteri