Patterning metal electrode and preparation method thereof

The invention discloses a patterning metal electrode and a preparation method thereof. The preparation method comprises the following steps: step 1, spinning and coating polymethyl methacrylate on a substrate to obtain a polymethyl methacrylate corrosion-resistant layer; step 2, carrying out ink-jet...

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Bibliographische Detailangaben
Hauptverfasser: LIU YUNYIN, ZHANG LEI, YU GUI, HU WENPING, WANG HANLIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a patterning metal electrode and a preparation method thereof. The preparation method comprises the following steps: step 1, spinning and coating polymethyl methacrylate on a substrate to obtain a polymethyl methacrylate corrosion-resistant layer; step 2, carrying out ink-jet printing of corrosive solvent and forming a patterning structure by corrosion at the surface of the polymethyl methacrylate corrosion-resistant layer so as to obtain a patterning corrosion-resistant layer; and step 3, carrying out metal deposition on the surface of the patterning corrosion-resistant layer so as to obtain a conductive layer and carrying out stripping of the substrate from the patterning corrosion-resistant layer so as to obtain a patterning metal electrode. According to the invention, there is no special requirement for the substrate; and processing on most of plane substrates can be realized. Moreover, the provided method has the advantages of low price, balanced metal resolution ratio and photoet