Dual single sided sputter chambers with sustaining heater

The invention relates to a disk processing system having a heater chamber and dual single-sided sputter chambers each with a sustaining heater.

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Bibliographische Detailangaben
Hauptverfasser:	TATSURU TANAKA, HONGLING LIU, HUA YUAN, CHANG B. YI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to a disk processing system having a heater chamber and dual single-sided sputter chambers each with a sustaining heater.