Conveyor jig and substrate manufacturing method

The invention relates to a conveyor jig and a substrate manufacturing method. The conveyor jig is a jig for conveying substrates. The conveyor jig comprises a jig body part and a decompression holding part. The jig body part includes a substrate supporting face, a plurality of absorption holes and a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TOMOYUKI NOZUE, HIROSHI SAIJOU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a conveyor jig and a substrate manufacturing method. The conveyor jig is a jig for conveying substrates. The conveyor jig comprises a jig body part and a decompression holding part. The jig body part includes a substrate supporting face, a plurality of absorption holes and a vacuum chamber. A plurality of independent substrates are arranged in a specified manner on the substrate supporting face. The plurality of absorption holes are used for absorbing the plurality of independent substrates arranged on the substrate supporting face. The vacuum chamber is connected with the absorption holes. The decompression holding part includes a supply port for supplying negative pressure for the vacuum chamber, and a vacuum valve arranged between the supply port and the vacuum chamber, wherein when the vacuum chamber is supplied with negative pressure, the vacuum valve is closed to maintain the vacuum chamber in a decompression state. By using the conveyor jig, the printing precision is ensured, a