Flow sensor

A flow sensor for direct measurement of mass flow that includes a rigid, electrically conductive carrier part and a sensor element that is connected to the carrier part via electrically conductive connections. The sensor element includes a plate-like carrier substrate on which a temperature sensor a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: POLLY STEFAN, NIESSNER GEORG, ROHM MATHIAS, GAAL MARTIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A flow sensor for direct measurement of mass flow that includes a rigid, electrically conductive carrier part and a sensor element that is connected to the carrier part via electrically conductive connections. The sensor element includes a plate-like carrier substrate on which a temperature sensor and a heating element are disposed. The sensor element also includes a stable encapsulation, which partially surrounds the sensor element and the carrier part in form-locking fashion. The sensor element also includes a first region on a top side of the sensor element that is not covered by the encapsulation and a second region of an underside of said sensor element that is not covered by the encapsulation. The mass flow to be measured can circulate around the first region and the second region without hindrance.