Non-telecentric voltage imaging optical system (NTVIOS)

The application relates to a non-telecentric voltage imaging optical system. Disclosed is a device for performing electrical checking on an electronic device that is tested, and irradiation light does not pass through an imaging lens before reaching a modulator. The system neither needs nor adopts a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: THOMAS H. BAILEY, LLOYD JONES
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The application relates to a non-telecentric voltage imaging optical system. Disclosed is a device for performing electrical checking on an electronic device that is tested, and irradiation light does not pass through an imaging lens before reaching a modulator. The system neither needs nor adopts a polarization control module of a conventional voltage imaging optical system to eliminate light noise. This characteristic of the described optical system substantially lowers quality, cost and complexity of the whole checking device. In addition, the quality, the cost and the complexity of a non-telecentric lens used for the described system are far lower than those of a non-telecentric lens in a conventional checking system. The system incorporates a checking head which includes an electro-optic modulator, a bias voltage source which generates a bias voltage mode applied to the electro-optic modulator, a light source used for generating an optical pulse for irradiating the electro-optic modulator, and a non-tele