Heat treatment device

The invention provides a heat treatment device capable of suppressing non-uniform drying of coating film during heat treatment device. The heat treatment device comprises a plurality of vibration plate portions (2) parallelly arranged on the direction for conveying substrates (W), an ultrasonic gene...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MIYAJIMA YUYA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!