Geometric dimension measuring instrument of silicon rod

The invention relates to a geometric dimension measuring instrument of a silicon rod. The geometric dimension measuring instrument of the silicon rod comprises a fixing frame, a block calibration device, a vertically-mounted optocoupler, a silicon rod protection board lifting device, a detection pla...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG WEI, YE FANGPING, LI XIAOMIN, YUAN LEIHUA, TANG LIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a geometric dimension measuring instrument of a silicon rod. The geometric dimension measuring instrument of the silicon rod comprises a fixing frame, a block calibration device, a vertically-mounted optocoupler, a silicon rod protection board lifting device, a detection platform lifting device, a worktable adjusting device, an IPC (industrial personal computer), a switch box, an air switch, a display device, a silicon rod protection board assembly, a detection platform assembly provided with a measuring camera, and a worktable assembly for placing the silicon rod. The silicon rod protection board assembly and the detection platform assembly are respectively driven by the corresponding lifting device to perform reciprocating motion in the direction of gravity, and the silicon rod can be driven by the worktable adjusting device to perform transverse, longitudinally and circumferential rotation motion. Therefore, the geometric dimension measuring instrument of the silicon rod has the fo