Inspection system and inspection method

An inspection system captures an inspected object which is illuminated by an illumination system and processes an image of the inspected object which is expressed by the obtained image data to inspect it. The inspection system includes a processing information determining portion determining process...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKIZAWA AKIHIK, IZUTSU OSAMU, ONO YOKO, SEKI KATSUTOSHI, HAYASHI YOSHINORI, WAKABA HIROSHI, GONDO TAKANORI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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