Inspection system and inspection method

An inspection system captures an inspected object which is illuminated by an illumination system and processes an image of the inspected object which is expressed by the obtained image data to inspect it. The inspection system includes a processing information determining portion determining process...

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Bibliographische Detailangaben
Hauptverfasser:	TAKIZAWA AKIHIK, IZUTSU OSAMU, ONO YOKO, SEKI KATSUTOSHI, HAYASHI YOSHINORI, WAKABA HIROSHI, GONDO TAKANORI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection system captures an inspected object which is illuminated by an illumination system and processes an image of the inspected object which is expressed by the obtained image data to inspect it. The inspection system includes a processing information determining portion determining processing information which is used for the inspection processing which changes along with the change of the amount of illumination light from the illumination system from the initial amount of light to the target amount of light when the set amount of light of the illumination system is changed from the initial amount of light to the target amount of light, and which system performs the inspection processing by using processing information which is determined by the processing information determining means in accordance with the elapsed time from when the set amount of light of the illumination system is switched to the target amount of light.