Illumination system, illumination method, and inspection system

An illumination system includes a first illumination unit (30) which uses an amount of illumination light in accordance with a set amount of light to illuminate an illuminated object, a second illumination unit (43) which has a response to switching of the set amount of light better than said first...

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Bibliographische Detailangaben
Hauptverfasser:	TAKIZAWA AKIHIK, IZUTSU OSAMU, ONO YOKO, SEKI KATSUTOSHI, HAYASHI YOSHINORI, WAKABA HIROSHI, GONDO TAKANORI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An illumination system includes a first illumination unit (30) which uses an amount of illumination light in accordance with a set amount of light to illuminate an illuminated object, a second illumination unit (43) which has a response to switching of the set amount of light better than said first illumination unit (30) and which uses illumination light which is superposed on the illumination light from said first illumination unit (30) to illuminate said illuminated object, and an illumination controller (60) which controls the amount of illumination light of said second illumination unit (43) by switching the set amount of light in accordance with the control information while maintaining the amount of illumination light of said first illumination unit (30) at a predetermined amount.