Inhomogeneous field strength plasma waste gas processing apparatus and processing system thereof
The invention relates to an inhomogeneous field strength plasma waste gas processing apparatus and a processing system thereof. The processing system comprises a gas inlet tube, a packed tower, the processing apparatus, a centrifuge fan and an exhaust tube which are sequentially communicated, a plur...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an inhomogeneous field strength plasma waste gas processing apparatus and a processing system thereof. The processing system comprises a gas inlet tube, a packed tower, the processing apparatus, a centrifuge fan and an exhaust tube which are sequentially communicated, a plurality of plasma processing mechanisms are arranged in the plasma shell of the processing apparatus, each of the plasma processing mechanisms comprises a pedestal, an annular flange is arranged in the pedestal, the front and tail surfaces of the flange are connected with a ground electrode plate and a high-voltage electrode plate respectively, an air outlet and an insulation medium plate are arranged between the ground electrode plate and the flange, the front surface of the high-voltage electrode plate is provided with a plurality of pointed cones, the tips of the pointed cones are provided with through holes, the external surface of the ground electrode is provided with a first insulation layer, the tail surface o |
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