Apparatus and method for the treatment of flat substrates

The plant comprises: a bath container (6), which is filled up to a fluid level (8) with a liquid treatment medium (10); a transport device, by which substrates (4) are guided by guiding elements and transported by the treatment medium in a horizontal transport plane in a feed direction in such a way...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FLORIAN KALTENBACH, ENRICO HAUCHWITZ, SEBASTIAN PATZIG KLEIN, DIRK BAREIS, DIETMAR BERNAUER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The plant comprises: a bath container (6), which is filled up to a fluid level (8) with a liquid treatment medium (10); a transport device, by which substrates (4) are guided by guiding elements and transported by the treatment medium in a horizontal transport plane in a feed direction in such a way that a treatment side of the substrates is immersed into the treatment medium; a circulation device, by which the treatment medium is circulated into the bath container, where the circulation device comprises a suction device, by which the treatment medium is withdrawn from the bath container. The plant comprises: a bath container (6), which is filled up to a fluid level (8) with a liquid treatment medium (10); a transport device, by which substrates (4) are guided by guiding elements and transported by the treatment medium in a horizontal transport plane in a feed direction in such a way that a treatment side of the substrates is immersed into the treatment medium; a circulation device, by which the treatment med