Broadband ion beam analyzer

The invention discloses a broadband ion beam analyzer which is used for isolating a required ion in a broadband ion beam. The broadband ion beam analyzer comprises an upper magnetic pole, a lower magnetic pole, an upper magnet exciting coil, a lower magnet exciting coil, an analyzing light bar and a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LONG HUIYUE, PENG LIBO, XIE JUNYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a broadband ion beam analyzer which is used for isolating a required ion in a broadband ion beam. The broadband ion beam analyzer comprises an upper magnetic pole, a lower magnetic pole, an upper magnet exciting coil, a lower magnet exciting coil, an analyzing light bar and a magnet yoke. The upper magnetic pole and the lower magnetic pole are respectively provided with an entering end boundary and an exiting end boundary, wherein both the entering end boundary and the exiting end boundary are arc-shaped. Both the radius of the cambered surface of the entering end boundary and the radius of the cambered surface of the exiting end boundary are equal to the deflection radius of the required ion in a magnetic field. According to the broadband ion beam analyzer, the upper magnetic pole with the arch-shaped entering end boundary and the arc-shaped exiting end boundary and the lower magnetic pole with the arch-shaped entering end boundary and the arc-shaped exiting end boundary are adopted,