Three-dimensional micro touch probe based on capacitive sensor array

The invention relates to a three-dimensional micro touch probe based on a capacitive sensor array. The probe is formed by a square base plate, the capacitive sensor array, a cross beam and a point gauge, and is characterized in that the probe is provided with a plurality of capacitive sensing units distributed on the square base plate in an array type; the point gauge is connected onto a central connecting body of the cross beam; a cantilever of the cross beam is connected with an upper electrode plate of a capacitive sensor; the upper electrode plate is suspended through a micro spring suspension unit; the suspension of the upper electrode plate is realized by adopting a plurality of micro springs; the micro springs are not only used for fixing the upper electrode plate of the capacitive sensor, but also used for supporting the weight of the point gauge of the cross beam; and a lever structure formed by the point gauge and the cross beam amplifies lateral displacement of an object to be measured, and convert