Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement
A spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure spring structure to supp...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement belongs to ultra precise measurement and ultra precise processing devices. The platform adopts three or more than three vibration isolators of static pressure spring structure to support a spring vibration isolation platform body and load of the body, adopts a beam splitter prism and a photoelectric detector to achieve six degree-of-freedom gesture monitoring of the platform, and places a horizontal displacement executer between the vibration isolators and the platform body to achieve three degree-of-freedom gesture adjustment of the platform body. A zero position reference device supported by a spring absorber effectively isolates effect of ground vibration on reference beam detection and improves stability of the laser beam zero position reference. The spring vibration isolation platform adopts the photoelectric detector to detect flat float and angle float of a reference light beam, utilizes a pair of wedge angle prisms capable of adjusting relative position distance and angle to adjust the flat float and angle float of the reference light beam in real time and achieve correction of the reference light beam, and is capable of remarkably improving vibration isolation performance of the platform. |
---|