Method and apparatus for measuring shape of surface to be inspected, and method for manufacturing optical element

Provided is a measuring method or measuring apparatus, wherein a time needed to measure the whole shape of a surface to be inspected can be shortened. A plurality of measuring ranges are respectively set such that, with a part of the surface to be inspected as one measuring range, each measuring ran...

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Bibliographische Detailangaben
1. Verfasser:	OSAKI YUMIKO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	Provided is a measuring method or measuring apparatus, wherein a time needed to measure the whole shape of a surface to be inspected can be shortened. A plurality of measuring ranges are respectively set such that, with a part of the surface to be inspected as one measuring range, each measuring range forms an overlapping region with at least a part of one other measuring range. Then, the shape of the surface to be inspected is measured with first resolution within a first measuring range among the measuring ranges, and is measured with second resolution within a second measuring range. Using the measurement data, the shape of the surface to be inspected is calculated by combining the data of the shapes of the surfaces within the measuring ranges.