Wafer library device of silicon wafer transmission system

The invention provides a wafer library device of a silicon wafer transmission system, which is used for operating a wafer box. The wafer library device of the silicon wafer transmission system comprises a wafer library framework, a wafer box bearing platform and a wafer library unlocking mechanism;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU JIANSHAN, WANG SHAOYU, TIAN YAOJIE, JIANG JIE, HUANG CHUNXIA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!