Wafer library device of silicon wafer transmission system

The invention provides a wafer library device of a silicon wafer transmission system, which is used for operating a wafer box. The wafer library device of the silicon wafer transmission system comprises a wafer library framework, a wafer box bearing platform and a wafer library unlocking mechanism;...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU JIANSHAN, WANG SHAOYU, TIAN YAOJIE, JIANG JIE, HUANG CHUNXIA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a wafer library device of a silicon wafer transmission system, which is used for operating a wafer box. The wafer library device of the silicon wafer transmission system comprises a wafer library framework, a wafer box bearing platform and a wafer library unlocking mechanism; the wafer library unlocking mechanism is arranged on a surface of the wafer library framework and near the bottom end of the wafer library framework; a vertical motion unit is arranged on another surface of the wafer library framework; and the wafer box bearing platform is connected with the vertical motion unit through an adapter which is moving under a driving force of the vertical motion unit to drive the wafer box bearing platform to move. The wafer library device of the silicon wafer transmission system provided by the invention is characterized in that the height of the wafer box bearing platform is adjustable.