Wafer library device of silicon wafer transmission system

Wafer library device of silicon wafer transmission system

The invention provides a wafer library device of a silicon wafer transmission system, which is used for operating a wafer box. The wafer library device of the silicon wafer transmission system comprises a wafer library framework, a wafer box bearing platform and a wafer library unlocking mechanism;...

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Hauptverfasser: ZHU JIANSHAN, WANG SHAOYU, TIAN YAOJIE, JIANG JIE, HUANG CHUNXIA
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator ZHU JIANSHAN
WANG SHAOYU
TIAN YAOJIE
JIANG JIE
HUANG CHUNXIA
description The invention provides a wafer library device of a silicon wafer transmission system, which is used for operating a wafer box. The wafer library device of the silicon wafer transmission system comprises a wafer library framework, a wafer box bearing platform and a wafer library unlocking mechanism; the wafer library unlocking mechanism is arranged on a surface of the wafer library framework and near the bottom end of the wafer library framework; a vertical motion unit is arranged on another surface of the wafer library framework; and the wafer box bearing platform is connected with the vertical motion unit through an adapter which is moving under a driving force of the vertical motion unit to drive the wafer box bearing platform to move. The wafer library device of the silicon wafer transmission system provided by the invention is characterized in that the height of the wafer box bearing platform is adjustable.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Wafer library device of silicon wafer transmission system
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