Polyimide stripping liquid for chips and preparation method of polyimide stripping liquid

The invention discloses polyimide stripping liquid for chips. The polyimide stripping liquid is characterized by comprising the following ingredients (mass percent): 5 to 60 percent of pyrrolidone, 5 to 80 percent of sulfoxide, 5 to 40 percent of alcohol ether, 0.1 to 20 percent of quaternary ammoni...

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Bibliographische Detailangaben
1. Verfasser:	LIAO YONGQIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention discloses polyimide stripping liquid for chips. The polyimide stripping liquid is characterized by comprising the following ingredients (mass percent): 5 to 60 percent of pyrrolidone, 5 to 80 percent of sulfoxide, 5 to 40 percent of alcohol ether, 0.1 to 20 percent of quaternary ammonium, 0.1 to 10 percent of alkali and the rest of water. Polyimide can be fast and thoroughly removed (without residues), metal materials can also be prevented from being damaged through oxidation, and the qualified rate of products is effectively improved.