Overcoming mechanism for frame effect of winding magnetron sputtering coating system

The invention relates to an overcoming mechanism for a frame effect of a winding magnetron sputtering coating system. The overcoming mechanism for the frame effect of the winding magnetron sputtering coating system comprises brackets, a linking baffle and a roller frame, wherein the roller frame is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI FANG, SONG YARUI, MA JIANWEI, QI ZENGLU, SHI WEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to an overcoming mechanism for a frame effect of a winding magnetron sputtering coating system. The overcoming mechanism for the frame effect of the winding magnetron sputtering coating system comprises brackets, a linking baffle and a roller frame, wherein the roller frame is provided with a sliding rod capable of relatively moving up and down; the brackets are respectively arranged at two ends of the linking baffle; the roller frame is fixed on the brackets; a roller is mounted at the upper end of the sliding rod of the roller frame; a connecting rod is mounted between the linking baffle and the roller frame; the upper end of the connecting rod is movably connected with the linking baffle; the lower end of the connecting rod is movably connected with the sliding rod of the roller frame; the linking baffle is composed of two hinges; and the two hinges are connected through a pin and can be opened or closed. The overcoming mechanism for the frame effect of the winding magnetron sputterin