Device used for conveying substrate

The invention discloses a device used for conveying a substrate. The device used for conveying the substrate includes a vacuum chamber; a tray used for conveying the substrate in the vacuum chamber; an upper conveying unit used for transmitting driving force to the upper part of the tray in a manner...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LEE CHOON CHI, KIM YONG MIN, CHEONG HONG KI, KIM CHONG HEUN, KIM GI CHAN, HAN GYONG LOK, WU GI YONG, EUN HEE GWAN, SU SAHNG HEUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses a device used for conveying a substrate. The device used for conveying the substrate includes a vacuum chamber; a tray used for conveying the substrate in the vacuum chamber; an upper conveying unit used for transmitting driving force to the upper part of the tray in a manner of not contacting with the upper end part of the tray; a relative movement allowing unit coupled to the lower end part of the tray and capable of moving relatively to the tray; and a plurality of guide units used for contacting with the relative movement allowing unit and guiding the movement of the tray.