Ultraviolet irradiation device

The invention provides an ultraviolet irradiation device, which enhances the efficiency of replacing the gas in a housing accommodating an ultraviolet lamp so as to shorten the time for gas replacement and reduce the replaced gas amount. The ultraviolet irradiation device comprises an ultraviolet la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KATAGIRI TSUYOSHI, HIROI KAZUNORI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention provides an ultraviolet irradiation device, which enhances the efficiency of replacing the gas in a housing accommodating an ultraviolet lamp so as to shorten the time for gas replacement and reduce the replaced gas amount. The ultraviolet irradiation device comprises an ultraviolet lamp (2) which radiates ultraviolet rays on a workpiece (W); a housing (3) which accommodates the ultraviolet lamp (2) and has an opening part (3) opened opposite to the workpiece (W); and a gas supply mechanism (4) for supplying gas into the housing (3). A circulation guide surface (3x) is arranged on an inner surface or in the interior space of the housing (3) and is used for one-way circulation of gas supplied by the gas supply mechanism (4) around the ultraviolet lamp (2).