Large-stroke and high-precision micro-motion platform
The invention discloses a large-stroke and high-precision micro-motion platform which is characterized by comprising a macro-motion part, a micro-motion part and a microcomputer control device, wherein the macro-motion part comprises a linear guide rail, a macro-motion platform driven by a precise b...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a large-stroke and high-precision micro-motion platform which is characterized by comprising a macro-motion part, a micro-motion part and a microcomputer control device, wherein the macro-motion part comprises a linear guide rail, a macro-motion platform driven by a precise ball screw mechanism, and a grating measurer; the micro-motion part comprises a micro-motion driving mechanism arranged on the macro-motion platform, a workpiece fixing device driven by the micro-motion driving mechanism, and a laser interferometer; the electrical signal output of the grating measurer and the electrical signal output of the laser interferometer are respectively connected with the electrical signal input of the microcomputer control device; and the control signal output of the microcomputer control device is respectively connected with the control electrical signal input of the precise ball screw mechanism and the control electrical signal input of the micro-motion driving mechanism. Compared with th |
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