Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology

Bibliographische Detailangaben

Hauptverfasser:	ZUO CHAO, SUI XIUBAO, CHEN QIAN, FENG SHIJIE, HE WEIJI, GU GUOHUA, LI RUBIN, FENG FANGXIAOYU, QIAN WEIXIAN, SHEN GUOCHEN, REN JIANLE
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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