Comet aberration detection method and comet aberration detection device

The invention provides a comet aberration detection method and a comet aberration detection device. According to the invention, the aberration comet detection method comprises a first step of arranging photolithographic masks on a photolithographic mask placing platform; a second step of carrying out the calibration so that the photolithographic masks on the photolithographic mask placing platform are aligned; a third step of transmitting light ray vertically to a photolithographic mask reference plate on the photolithographic mask placing platform so that the light ray sequentially passes through an aerial image sensor mark on the back of the photolithographic mask reference plate, a condenser lens, and an aerial image sensor opening on a wafer placing platform and is reflected to an aerial image sensor detection system by a reflector; and a fourth step of collecting the comet aberration data related to the condenser lens by the aerial image sensor detection system.