Small-power microwave microplasma integration source

The invention discloses a small-power microwave microplasma integration source. The small-power microwave microplasma integration source comprises a phase-locked loop frequency synthesizer, an adjustable attenuator which is connected with the phase-locked loop frequency synthesizer, a width power am...

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Bibliographische Detailangaben
Hauptverfasser:	HUANG JIAHUA, ZHU SHOUZHENG, LIAO BIN, WANG KEQIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	The invention discloses a small-power microwave microplasma integration source. The small-power microwave microplasma integration source comprises a phase-locked loop frequency synthesizer, an adjustable attenuator which is connected with the phase-locked loop frequency synthesizer, a width power amplifier which is connected with the adjustable attenuator, a circulator which is connected with the width power amplifier, and a plane micro-strip gradual change spiral inductive coupling coil which is connected with the circulator. During work, small-power microwaves are input into the plane micro-strip gradual change spiral inductive coupling coil, and microwave microplasmas are excited. The small-power microwave microplasma integration source has the advantages of adjustable frequency and power, small size and convenience in carrying, and the like, and a power source can be protected.