$The producing of diffraction optical element with structured glass coating$

The producing of diffraction optical element with structured glass coating

The invention relates to an optical element, especially relates to a method of applying a photoactive structure on a substrate, and an assembly produced with the method. The method comprises photolithography and material deposition by means of physical vapor deposition process.

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Bibliographische Detailangaben
Hauptverfasser:	MUND DIETRICH, HAMMERL KLAUS MICHAEL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to an optical element, especially relates to a method of applying a photoactive structure on a substrate, and an assembly produced with the method. The method comprises photolithography and material deposition by means of physical vapor deposition process.