Travelling wave magnetic field method for improving resistivity uniformity of Czochralski silicon

The invention relates to a travelling wave magnetic field method for improving resistivity uniformity of Czochralski silicon. The travelling wave magnetic field method is characterized by comprising the following steps of: mounting a travelling wave magnetic field generator outside a single crystal...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG XUENAN, LI JIANHONG, LIU YIBO, LI YAZHE, SONG DUMING, JIAN RUIJUAN
Format: Patent
Sprache:chi ; eng
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