Stimulation and vibration pick integrated pressure sensor of electric heating stimulation-piezoresistance vibration pick resonance beam

Bibliographische Detailangaben

Hauptverfasser:	TANG ZHANGYANG, XING WEIWEI, LI QINGFENG, FAN SHANGCHUN, SUN MIAOMIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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