Method for manufacturing a photovoltaic cell structure

In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized...

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Bibliographische Detailangaben
Hauptverfasser: ROSCHEK TOBIAS, GOLDBACH HANNO, KUPICH MARKUS, BRONNER MARKUS, MEIER JOHANNES
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized and doped in a thin surface area (5).