Sealing device and system

The invention discloses a sealing device, relating to the technical field of sealing of semiconductor process equipment. The sealing device comprises an inflatable sealing ring and an air charging device for charging the inflatable sealing ring, wherein the inflatable sealing ring is used for sealin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MU XIAOHANG, HAO YONGPENG, ZHAO XINGMEI, WANG LIRONG, DONG JINWEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention discloses a sealing device, relating to the technical field of sealing of semiconductor process equipment. The sealing device comprises an inflatable sealing ring and an air charging device for charging the inflatable sealing ring, wherein the inflatable sealing ring is used for sealing a space to be sealed; the inflatable sealing ring comprises an inflatable ring and a fixing base integrated with the inflatable ring; the inflatable ring is used for sealing the space to be sealed; and the fixing base is used for fixing the inflatable sealing ring. The invention further discloses a sealing system, comprising the sealing device and a sealing door. In the invention, the inflatable sealing is adopted to eliminate a gap between a door and a door frame during sealing so as to achieve a good sealing effect; in addition, a product of the sealing device is more stable, difficult to damage, simple in structure and longer in service life in a utilization process.