Cylinder surface treatment for monochlorosilane

The present invention is a container and a process for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable le...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MCDERMOTT WAYNE THOMAS, LO SAI-HONG A, XIAO MANCHAO, DERECSKEI-KOVACS AGNES, PEARLSTEIN RONALD MARTIN, BEHM PHILIP E
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING LIGHTING MECHANICAL ENGINEERING STORING OF DISTRIBUTING GASES OR LIQUIDS VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
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Beschreibung
Zusammenfassung:	The present invention is a container and a process for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.