Stirrer and plating apparatus comprising stirrer

The invention provides a stirrer and a plating apparatus comprising the stirrer. The stirrer comprises a storage container for storing solutions; a rotating shaft rotatably mounted in the storage container; and an impeller structure which is arranged in the storage container and is jointed to the ro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OH SAE-MIN, YOO DAL-HYUN, CHOI BONG-KYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a stirrer and a plating apparatus comprising the stirrer. The stirrer comprises a storage container for storing solutions; a rotating shaft rotatably mounted in the storage container; and an impeller structure which is arranged in the storage container and is jointed to the rotating shaft. The impeller structure comprises a first impeller, a second impeller jointed to the lower portion of the first impeller, and a separating plate for separating the first and second impellers.