Surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, as well as mechanical booster pump, turbomolecular pump, or dry pump treated with said surface-treatment method

Provided is a surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, said method resulting in high resistance to corrosion and low outgassing. Also provided is a dry pump treated with said surface-treatment method. Components of mechanical booster pu...

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Bibliographische Detailangaben
Hauptverfasser:	INAYOSHI SAKAE, ISHIGURE FUMIAKI, SATO HIROSHI, MIURA TATSUYA, ISHIKAWA YUICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS THEREFOR BLASTING CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES HEATING INDEXING SCHEME FOR ASPECTS RELATING TONON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES ORJET-PROPULSION PLANTS INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES ORMATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHERTHAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUSSUBCLASSES OF CLASSES F01-F04 LIGHTING MECHANICAL ENGINEERING METALLURGY NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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Beschreibung
Zusammenfassung:	Provided is a surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, said method resulting in high resistance to corrosion and low outgassing. Also provided is a dry pump treated with said surface-treatment method. Components of mechanical booster pumps, turbomolecular pumps, or dry pumps comprise aluminum or aluminum alloy, and the surfaces of said components are immersed in an alkaline solution and treated with micro-arc oxidation.