Method and device for managing a manufacturing environment using tool operating data

The invention relates to a method and a device for managing a manufacturing environment using tool operating data. A solution for managing a manufacturing environment using operating data for each of a plurality of tools in the manufacturing environment. The operating data can include actual resourc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BARKER BRIAN C, WONG JUSTIN W, KLEINHENZ RICHARD L, REATH MARK L, HIGGINS EDWARD P, MOORE GARY R, ZISGEN HORST
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a method and a device for managing a manufacturing environment using tool operating data. A solution for managing a manufacturing environment using operating data for each of a plurality of tools in the manufacturing environment. The operating data can include actual resource consumption data and/or actual exhaust generation data for a tool while the tool implements at least a portion of a recipe to manufacture one of a plurality of types of products manufactured in the manufacturing environment. Operation of the manufacturing environment can be configured to optimize one or more aspects of resource consumption and/or exhaust generation during the manufacture of desired quantities of the plurality of types of products within a desired time frame using the operating data.