Novel carbon nano tube field emission cold cathode and manufacturing method thereof

The invention provides a novel carbon nano tube field emission cold cathode and a manufacturing method thereof. The novel carbon nano tube field emission cold cathode comprises a silicon substrate with a surface three-dimensional microstructure array, a metal functional layer prepared on the silicon...

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Bibliographische Detailangaben
Hauptverfasser: MA HUALI, ZHANG RUI, QIAO SHUZHEN, RU YI, TIAN SHUO, ZENG FANGUANG, CHEN LEIMING, ZHANG TIANXIA
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a novel carbon nano tube field emission cold cathode and a manufacturing method thereof. The novel carbon nano tube field emission cold cathode comprises a silicon substrate with a surface three-dimensional microstructure array, a metal functional layer prepared on the silicon substrate and a carbon nano tube thin film growing on the metal functional layer. In the manufacturing method of the novel carbon nano tube field emission cold cathode, a three-dimensional growing process instead of the traditional planar carbon nano tube growing process is adopted, namely, a three-dimensional microstructure is made on the surface of a carbon nano tube growing substrate by adopting a micromachining technology, a single-component or composite metal functional layer is made on the surface of the three-dimensional microstructure, and the carbon nano tube thin film grows on the metal functional layer substrate on the surface of the three-dimensional microstructure, therefore, the area of the emission