Anti-reflection coating of crystalline silicon solar cell and preparation method thereof

The invention discloses an anti-reflection coating of a crystalline silicon solar cell and a preparation method for the anti-reflection coating. The refraction index is increased from top to bottom at equal rate, wherein the minimum refraction index is 1.95, and the maximum refraction index is 2.45. The preparation method comprises the following steps of: bearing monocrystal or polycrystalline silicon by using graphite boat; depositing the coating through glow discharge under the condition that silane and ammonia gas are introduced; and annealing after the glow discharge is finished, wherein the silane flow continuously decreases with the glow time and the ammonia gas flow continuously increases with glow time. The anti-reflection coating of the crystalline silicon solar cell has better anti-reflection effect, the generation quantity of photon-generated carriers is increased, additional equipment or device is not needed, and the method is simple and easy to master, and has the characteristics of convenience f