High-resolution angle measuring method based on guided-mode resonance structural design

High-resolution angle measuring method based on guided-mode resonance structural design

The invention relates to a high-resolution angle measuring method based on a guided-mode resonance structural design, comprising the following steps: a guided-mode resonance filter is prepared; the natural S value of the guided-mode resonance filter is obtained by test; and the high-resolution angle...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HU JINBING, TAO CHUNXIAN, WANG QI, YANG HUIYIN, ZHUANG SONGLIN, ZHANG DAWEI, HUANG YUANSHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The invention relates to a high-resolution angle measuring method based on a guided-mode resonance structural design, comprising the following steps: a guided-mode resonance filter is prepared; the natural S value of the guided-mode resonance filter is obtained by test; and the high-resolution angle measurement is realized by utilizing the angle sensitivity of the guided-mode resonance filter to the incident light. In the invention, a way is provided for precise measurement.